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The optimization of the nucleation and epitaxial
growth of wide bandgap semiconductors using non-thermal, controlled-energy
growth precursors, and the growth and characterization of sputtered
magnetic superlattices are major materials research areas at Ohio
University. Characterization of these materials in situ
is primarily through direct imaging methods including several
forms of emission microscopy and with photoelectron diffraction.
Pioneering efforts in the use of microscopy in materials characterization
have been made by Ohio University researchers, in particular the
development of compact emission microscopes for UHV real-time
material characterization during growth (Kordesch)
.
Direct Imaging Methods: Two photoelectron
emission microscopes (PEEM), a thermionic emission microscope and
a low energy electron microscope (LEEM) with in situ capabilities
and controlled energy deposition sources (a seeded supersonic molecular
beam, a discharge radical and metastable source, and a cold cathode
low energy ion source) are already in use to optimize the growth
of the wide bandgap semiconductors. In practice, the materials of
interest (diamond GaN, AlN, cBN) cannot be structurally equilibrated,
either due to undesirable structure transitions that are more favorable
at the growth temperature, or because the mobility of the constituents
is limited. The direct measurement of reactant mobility and transport
of the growth species, in situ, in real time will be used to optimize
growth. Emission microscopy is a high contrast method that is able
to detect surface layers as little as .001 monolayer thick, and
lateral dimensions on the order of 100 nm. It is best applied where
the trade-off between resolution and contrast can be made in favor
of image contrast and image acquisition rate. The dynamical behavior
of these layers can often be observed in real-time, in situ, with
emission microscopy.
Professor Smith
is a pioneer on Atomic Force Microscopy (AFM) and Scanning
Tunneling Microscopy (STM); especially applications to wide
gap nitride semiconductor surfaces. His research was recently featured
on the cover of the jounal Science.
Associated Faculty: Kordesch,
Smith
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