a- effusion cells7- Take the actuators off the shutter feedthroughs
b- main water hose
c- plasma source
d- thickness monitor
In order to bake out the analysis chamber you have to follow certain steps
1- Disconnect all the wires connected to the
chamber
2- Take the magnet that controls the transporting
receptacle
off the transporter rod
3- Take the micrometer that controls the jaws in
the
rotary-linear feedthrough out by unscrewing the screws which fix the
micrometer
at the feedthrough
4- Set the feedthrough that raises and lowers the
STM
stage at 22 ( the indicator reading)
5- Cover the windows (Glasses) with foils
6- Wrap the body of analysis chamber with foils
also
7- Cover the bellows ( including the controller
it
self) of the rotary-linear feedthrough with foils after setting the
indicator
at 8 inch( the scale reading)
8- Cover the bellows ( including the controller
itself)
of the rotary feedthrough that controls the sample receptacle in
Auger-analyzer
with foils
9- Cover the transporter rod with foils
10- Wrap a sheet of foil around the gate valve
between
the Ionic pump and the analysis chamber and the gate valve between the
analysis
chamber and the growth chamber
Those steps are the first things you
do. After doing them do the following instructions
11- Wind a 6 foot heating tape (HT) on the
transporter rod stating from the farthest point from the analysis
chamber till you cover
the whole rod or so ( you may use a 2 or 4 foot HT to extend the length)
12- Wind a 4 foot HT around the bellows of the
rotary-linear
feedthrough starting form the controller
13- Wind a 2 foot HT around the bellows of the
Auger-analyzer
starting form the controller
14- Wind a 4 foot HT around the tube, in where
the
STM sage is, starting from the flange on the top of the STM place ( not
around
the feedthrough)
15- Wind a 2 or 4 foot HT around the tube
in
where the Auger-analyzer is starting from the topmost point
16- Wind a 4 foot HT around the gate valve
between the
ionic pump and the analysis chamber
17- Wind a 2 foot HT around the gate valve
between the
analysis chamber and the growth chamber ( because we do not want to
heat
it up too much)
18- Stick a 4 or 6 foot HT under the flange
which
is located under the STM
19- Keep going with winding the HT’s around the
analysis
chamber body until you feel that they have covered the whole body
uniformly
Now you have to repeat the steps 6-10 again.
After
covering the chamber again with foils, do the following instructions
20- Connect the 2 foot HT’s to the same power
supply
( you may use more than one if needed)
21- Connect the 4 foot HT’s to the same power
supply
( you possibly need more than one)
22- Connect the 6 foot HT’s ( including the one
around
the ionic pump) to the same power supply
23- Set the current through the 2 foot HT’s at 1
Amp
24- Set the current through the 4 foot HT’s at 2
Amp
25- Set the current through the 6 foot HT’s at 3
Amp
26- When the pressure reaches around 4X10-8 torr,
close
the gate valve between the load lock and the analysis chamber, and open
the
gate valve between the ionic pump and the analysis chamber
27- Make sure that the temperature dose not
exceed 150
Co at any point on the chamber
28- Let the chamber baked out for two days
29- Disconnect the HT at the ionic pump, and wait
for
one and a half hour
30- Disconnect the HT wound around the main
chamber,
and flash the Tantalum Sublimation Pump (TSP), then wait for one and a
half
hour
31- Disconnect all the HT’s; wait for one hour
32- Flash the TSP again, and wait for 4-5
hour
then flash the TSP again
33- Take the foils and the HT’s off the chamber